====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==========================================
    Ion and Target VACANCY production     
  See SRIM Outputs\TDATA.txt for calc. details
==========================================
--------------------------------------------------------------------
    Recoil/Damage Calculations made with Kinchin-Pease Estimates    
--------------------------------------------------------------------
 See file :  SRIM Outputs\TDATA.txt for calculation data
 Ion    = Fe   Energy = 5000 keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     4.E+04 A ;
  Layer # 1- Density = 4.976E22 atoms/cm3 = 2.321 g/cm3
  Layer # 1- Si = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Total Target Vacancies     = 6832 /Ion

==========================================================
  Table Units are  >>>> Vacancies/(Angstrom-Ion)  <<<<  
==========================================================
   TARGET     VACANCIES     VACANCIES 
   DEPTH         by            by     
   (Ang.)       IONS         RECOILS  
-----------  -----------  ------------
400010.E-03  7092.50E-06  7167.99E-05  
800010.E-03  7695.00E-06  5094.33E-05  
120001.E-02  7482.50E-06  5755.76E-05  
160001.E-02  7627.50E-06  8156.75E-05  
200001.E-02  7797.50E-06  6928.80E-05  
240001.E-02  8057.50E-06  6422.18E-05  
280001.E-02  8025.00E-06  7550.81E-05  
320001.E-02  8127.50E-06  6635.30E-05  
360001.E-02  8400.00E-06  7457.79E-05  
400001.E-02  8490.00E-06  7863.29E-05  
440001.E-02  8372.50E-06  7264.97E-05  
480001.E-02  8522.50E-06  8477.43E-05  
520001.E-02  8752.50E-06  8737.23E-05  
560001.E-02  8935.00E-06  8960.37E-05  
600001.E-02  8995.00E-06  8750.43E-05  
640001.E-02  9377.50E-06  8504.97E-05  
680001.E-02  9455.00E-06  9252.53E-05  
720001.E-02  9447.50E-06  9256.25E-05  
760001.E-02  9605.00E-06  7863.78E-05  
800001.E-02  9425.00E-06  9117.71E-05  
840001.E-02  9910.00E-06  1007.67E-04  
880001.E-02  1003.50E-05  9513.65E-05  
920001.E-02  1028.00E-05  1165.46E-04  
960001.E-02  1044.00E-05  1214.46E-04  
100000.E-01  1032.50E-05  8456.54E-05  
104000.E-01  1057.50E-05  1018.80E-04  
108000.E-01  1088.50E-05  1297.60E-04  
112000.E-01  1125.75E-05  1043.26E-04  
116000.E-01  1131.75E-05  1077.80E-04  
120000.E-01  1157.00E-05  1242.18E-04  
124000.E-01  1156.50E-05  1361.73E-04  
128000.E-01  1186.50E-05  1062.22E-04  
132000.E-01  1201.25E-05  1159.06E-04  
136000.E-01  1201.75E-05  1319.37E-04  
140000.E-01  1222.75E-05  1389.29E-04  
144000.E-01  1279.00E-05  1331.44E-04  
148000.E-01  1294.25E-05  1346.11E-04  
152000.E-01  1315.25E-05  1235.50E-04  
156000.E-01  1344.00E-05  1495.85E-04  
160000.E-01  1390.00E-05  1367.00E-04  
164000.E-01  1386.50E-05  1851.08E-04  
168000.E-01  1415.75E-05  1684.68E-04  
172000.E-01  1451.25E-05  1745.67E-04  
176000.E-01  1488.25E-05  1604.15E-04  
180000.E-01  1510.25E-05  2064.97E-04  
184000.E-01  1497.25E-05  1835.47E-04  
188000.E-01  1569.50E-05  1733.16E-04  
192000.E-01  1590.75E-05  2084.86E-04  
196000.E-01  1559.50E-05  2161.63E-04  
200000.E-01  1571.75E-05  1801.78E-04  
204000.E-01  1606.75E-05  2321.87E-04  
208000.E-01  1598.50E-05  2156.97E-04  
212000.E-01  1673.00E-05  2249.75E-04  
216000.E-01  1692.25E-05  2715.05E-04  
220000.E-01  1702.25E-05  2446.86E-04  
224000.E-01  1684.00E-05  2457.22E-04  
228000.E-01  1739.00E-05  2376.22E-04  
232000.E-01  1792.25E-05  2396.61E-04  
236000.E-01  1862.75E-05  2754.78E-04  
240000.E-01  1959.25E-05  3095.90E-04  
244000.E-01  1962.75E-05  2907.11E-04  
248000.E-01  2064.50E-05  3134.13E-04  
252000.E-01  2140.50E-05  3188.68E-04  
256000.E-01  2291.00E-05  3360.38E-04  
260000.E-01  2325.50E-05  3801.45E-04  
264000.E-01  2278.25E-05  3658.12E-04  
268000.E-01  2270.25E-05  3577.14E-04  
272000.E-01  2444.50E-05  3718.37E-04  
276000.E-01  2391.75E-05  3553.86E-04  
280000.E-01  2387.50E-05  3616.13E-04  
284000.E-01  2509.00E-05  3929.99E-04  
288000.E-01  2574.25E-05  3825.41E-04  
292000.E-01  2596.25E-05  3703.24E-04  
296000.E-01  2368.25E-05  3509.85E-04  
300000.E-01  2295.00E-05  3539.24E-04  
304000.E-01  2214.50E-05  3230.94E-04  
308000.E-01  2182.75E-05  3278.34E-04  
312000.E-01  2059.50E-05  2934.27E-04  
316000.E-01  1862.50E-05  2657.40E-04  
320000.E-01  1701.75E-05  2392.75E-04  
324000.E-01  1399.75E-05  1814.89E-04  
328000.E-01  1216.00E-05  1635.25E-04  
332000.E-01  1004.25E-05  1227.89E-04  
336000.E-01  8415.00E-06  9908.91E-05  
340000.E-01  5955.00E-06  7857.28E-05  
344000.E-01  4817.50E-06  6040.13E-05  
348000.E-01  3095.00E-06  3304.79E-05  
352000.E-01  2332.50E-06  2601.71E-05  
356000.E-01  1242.50E-06  1306.43E-05  
360000.E-01  5500.00E-07  4547.43E-06  
364000.E-01  3650.00E-07  3424.45E-06  
368000.E-01  2200.00E-07  2074.68E-06  
372000.E-01  1300.00E-07  6729.89E-07  
376000.E-01  5500.00E-08  1071.31E-06  
380000.E-01  0000.00E+00  0000.00E+00  
384000.E-01  0000.00E+00  0000.00E+00  
388000.E-01  0000.00E+00  0000.00E+00  
392000.E-01  0000.00E+00  0000.00E+00  
396000.E-01  0000.00E+00  0000.00E+00  
400000.E-01  0000.00E+00  0000.00E+00  

 To convert to Energy Lost - multiply by Average Binding Energy =  7  eV/Vacancy
